Nature - 2019.08.29

Article reSeArcH

0

0.5

00 .5

D (input node) (Volts)

extract voltage transfer

curve (VTC) parameters

(a)

static noise margin (SNM) (% of VDD)

minimumSNM

(limits pNMS)

0% 25%

101

105

103

occurrences

(# of logi

c stages)

parametervalue

technology node

contacted gate pitch54 nm

gate,contact length 9nm, 9 nm

contact resistance 3

equivalent oxide

thickness (EOT)

0.7 nm

CNT pitch, diameter 2 nm, 1.7 nm

m-CNT resistance 40 k

IOFFtarget 100 nA/μm

layers

gate

source/drain

local interconnect

active region

tech

preferred

corner

p

NM

S pS:

99.999%

99.99%

99.9%

minimum SNM (% of VDD)

0 0.2 0.4

0%

99.9%

99%

90%

(j)

0

0.1

0.2

0.3

0.4

0.5

012

VOH

VIH

VIL

VOL

extracted data

affine model

affine model form:

(k)

EDP-

optimal

design

0.01

0.04

28

energy/cycle

(nJ)

Pareto-

optimal curve

clock frequency (GHz)

parasitic extraction

logic synthesis,

clock tree synthesis,

placement & routing,

parasitic extraction

(sweep over multiple

circuit parameters)

EDP optimization

energy/

cycle

physical designs

extracted netlists

library characterization

material properties

library cell layouts

compact model

0

3

00 .4

experimental

data

compact

model:

VGS VT

= 0.25 V

-VDS(V)

ID

)TNC / Aμ(

library power/timing

clock

frequency

inputs design flow

10

0

interconnect

target clock frequency

select the EDP-

optimal design over

multiple individual

physical designs

EDP optimization

FET/circuit parameters

processor

core:

single

physical

design

CNFET active

regions aligned

s-CNTs

m-CNTs

nand2 nor 2 (b) D flip-flop

MS

clkn

clkb

SS

SH

MH

D

(c) QN(d)

MH

(internal node)

(Volts

)

(VIH, VOL)

(VIL, VOH)

(e)

# m-CNTs in

pull-down network

volt

age

(Volts

)

(f)

where:

r = number of

sampling regions

Mi= number of m-CNTs

in sampling region i

(g)

(h)

(i)

standard

cells:

row 1

standard

cells:

row 2

region with

aligned CNTs

Variable

number of s-CNTs

Variable

number of m-CNTs

regiregion on (^12)
region 3
regiregion on (^45)
region 6
regiregion on (^78)
region 9
regiregion 10on 11
region 12
S1S2
S3
S4S5
S6
S7S8
S9
S10S11
S12
M1M2
M3
M4M5
M6
M7M8
M9
M1M1 (^01)
M1 2
U3 U4 U5
U6
P3,1
N3
,1
P5,1
N5
,1
N6
,1
P6,1
P4,1
N4
,1
P4,2
N4
,2
CLK
Extended Data Fig. 9 | See next page for caption.