SEMICONDUCTOR DEVICE PHYSICS AND DESIGN

(Greg DeLong) #1
380 CHAPTER 8. FIELD EFFECT TRANSISTORS

eφb

EF, m ΔEc
E -eVG
F, s

eV 2

eV 1

eVdi-


  • d -ds^0 Δd


eVdi+

Z

Z

nm npar
ns

Nd+

Z


  • 1 =-enεm


2 =

ens
ε


  • d -ds^0 Δd


(a)

(b)

(c)

(d)

Gate
Metal

{ {


AlGaAs GaAs

δ Layer-doped 2DEG


  • d -ds^0 Δd

    D


E

E

E(z)

Figure 8.15: (a) Schematic diagram of aδ-doped AlGaAs/GaAs MODFET, along with (b) the
charge distribution, (c) the band diagram, and (d) the electric field distribution in the structure.

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