Scanning Electron Microscopy and X-Ray Microanalysis

XIV

Modeling Electron and Ion

Interactions

An important component of modern Scanning
Electron Microscopy and X-ray Microanalysis
is modeling the interaction of beam electrons
and ions with the atoms of the specimen and its
environment. Such modeling supports image
interpretation, X-ray microanalysis of challeng-
ing specimens, electron crystallography methods,
and many other issues. Software tools for this pur-
pose, including Monte Carlo electron trajectory
simulation, are discussed within the text. These
tools are complemented by the extensive database
of Electron-Solid Interactions (e.g., electron scat-
tering and ionization cross sections, secondary
electron and backscattered electron coefficients,
etc.), developed by Prof. David Joy, can be found
in chapter 3 on SpringerLink: http://link.springer.
com/chapter/10.1007/978-1-4939-6676-9_3.

References

Knoll M (1935) Static potential and secondary emission of

bodies under electron radiation. Z Tech Physik 16:

Knoll M, Theile R (1939) Scanning electron microscope for

determining the topography of surfaces and thin

layers. Z Physik 113:

Oatley C (1972) The scanning electron microscope: part 1,

the instrument. Cambridge University Press, Cambridge

von Ardenne M (1938) The scanning electron microscope.

Theoretical fundamentals. Z Physik 109:

magHVWDHFW curr

3.9 mm51.2 μm

20 μm

Field of view 5.00 um Dwell Time Mag (4x5 2,540.00 XPolaroid)

5 000 x15.00 kV 86 pA 12.1 mm50.00 umWorking Dist Image Siz1024x1024e 0.7 9A50.0 usBlankar Current PrimaryDetectorETDetector

. Fig. 9 Directionally-solidified Al-Cu eutectic alloy after ion beam milling in a dual-beam instrument, as imaged by the
SEM column (left image); same region imaged in the HIM (right image)

Scanning Electron Microscopy and Associated Techniques: Overview