Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_9

133

Image Defects

9

9.1 Charging

9.1.1 What Is Specimen Charging? – 134

9.1.2 Recognizing Charging Phenomena in SEM Images – 135

9.1.3 Techniques to Control Charging Artifacts

(High Vacuum Instruments) – 139

9.2 Radiation Damage – 142

9.3 Contamination

9.4 Moiré Effects: Imaging What Isn’t Actually There

References – 146