Scanning Electron Microscopy and X-Ray Microanalysis

138

9

1 keV 1.5 keV

2 keV 5 keV

Incipient

Charging

Artifacts

. Fig. 9.7 Polystyrene latex spheres imaged over a range of beam energy, showing development of charging artifacts; Everhart–Thornley (posi-
tive bias) detector

5 keV 2 keV

. Fig. 9.8 (left) Higher magnification image of PSLs at E 0 = 5 keV; (right) reflection image from large plastic sphere that was charged at
E 0 = 10 keV and then imaged at E 0 = 2 keV; Everhart–Thornley (positive bias) detector

Chapter 9 · Image Defects