21216
EDS black box
Input:
X-ray photonOutput:
an estimate of
photon energyPhoton energyNumber of photonsRepeated measurements of the same
photon energy produce a range of
values: this is the spectrometer
resolution effect.True Mn K-L2,3 X-ray energy width ~ 7 eV. Fig. 16.2 “Black box” repre-
sentation of the EDS detection
and histogram binning process
Mn
E 0 = 20 keVPhoton energy (keV)Photon energy (keV)CountsCountsMn_20keVMn_20keV100 00080 00060 00040 00020 000C K
-L2+3Mn
L2-M1+3-M1Mn
L2-M4+N1, MnL3-M4+5Mn
L2-M2+3Mn
K-L2+3Mn
K-M2+3Mn
K-M2+3Mn
K-L2Si K
-L2+3Si K
-M2+3Mn
esc0
0246810100 00080 00060 00040 00020 0000
5 000 5 200 5 400 5 600 5 800 6 000 6 200 6 400 6 600 6 800 7 000Mn
K-L3. Fig. 16.3 SDD-EDS spectrum of Mn with E 0 = 20 keV and a time constant that produces a resolution of FWHM = 129 eV at Mn K-L2,3
Chapter 16 · Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters