Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_1

1

Electron Beam—Specimen

Interactions: Interaction

Volume

1

1.1 What Happens When the Beam Electrons Encounter

Specimen Atoms? – 2

1.2 Inelastic Scattering (Energy Loss) Limits Beam

Electron Travel in the Specimen – 2

1.3 Elastic Scattering: Beam Electrons Change

Direction of Flight – 4

1.3.1 How Frequently Does Elastic Scattering Occur? – 4

1.4 Simulating the Effects of Elastic Scattering:

Monte Carlo Calculations – 5

1.4.1 What Do Individual Monte Carlo Trajectories Look Like? – 6

1.4.2 Monte Carlo Simulation To Visualize the Electron

Interaction Volume – 6

1.4.3 Using the Monte Carlo Electron Trajectory Simulation to Study

the Interaction Volume – 8

1.5 A Range Equation To Estimate the Size of the Interaction

Volume – 12

References – 14