Scanning Electron Microscopy and X-Ray Microanalysis

233 16

75,000

Brem counts

70,000

65,000

60,000

55,000

50,000

45,000

40,000

35,000

30,000

25,000

20,000

15,000

10,000

10/13/11

10,06

10,05

10,04

10,03

10,02

10,01

10,00

9,99

9,98

9,97

Cu Kα

10/13/11 6/1/12 1/18/13 9/7/13 4/26/14 12/14/14 8/2/15

Channel width

6/1/12 1/18/13 9/7/13 4/26/14 12/14/14 8/2/15 3/21/16

Brem Counts

Channel width

Quality Control Report - May 27, 2016

NIST DTSA-II Version Iona 2015-08-24

EPQ Version Iona 2015-08-24

Detector Detector 0 - FWHM[Mn Ka]=128.0 eV - initial

Beam Energy 20.0 keV

Material Pure copper

Operator nritchie

Item Value

6/14/16

3/21/166/14/16

. Fig. 16.30 Quality control report charts

133.0

132.5

132.0

131.5

131.0

130.5

130.0

FWHM(eV

)

0 0.2 0.4 0.6 0.8 1 1.2 1.4

Probe current (nA)

eV/channel

FWHM Gain

10.004

10.003

10.002

10.001

10.000

9.999

9.998

9.997

9.996

9.994

9.995

. Fig. 16.31 Neither the resolu-
tion (FWHM at Mn K-L2,3 (Kα)) or
the gain (in eV/channel) should
change with probe current
16. 3 · Practical Aspects of Ensuring EDS Performance for a Quality Measurement Environment