Scanning Electron Microscopy and X-Ray Microanalysis

(coco) #1

243 17


Gold Layer, Aluminum Layer, Nickel Layer


Detector crystals typically have conductive layers on their
front face to ensure conductivity. These layers can be con-
structed by depositing various different metals on the sur-
face. The absorption profiles of these layers will decrease the
efficiency of the detector. The layer thicknesses are particu-
larly relevant for simulation; however, other uncertainties
usually exceed the effect of the conductive layer.


Dead Layer
The dead layer is an inactive or partially active layer of silicon
on the front face of the detector. The dead layer will absorb
some X-rays (particularly low energy X-rays) and produce
few to no electron–hole pairs. The result is a fraction of X-rays
which produce no signal or a smaller signal than their energy
would suggest. The result is twofold: The first effect is a dimin-
ishment of the number of low energy X-rays detected. The

5 000

10 000

15 000

20 000

25 000

30 000

35 000

0

Counts

5 600 5 700 5 800 5 900 6 000 6 100 6 200
Energy (eV)

Mn 1

Full height

Mn
K-L3

Mn
K-L2

. Fig. 17.5 Estimating the full width at half-maximum peak width. This peak is approximately 139 eV FWHM which you can confirm with a ruler


WD: Working distance
DD: Detector distance

Side view

Electron
column

X

X

Z

Y
Y

Sample

Elevation

Detector snout

DD
WD

Electron
column

Top view
looking down

Detector

Ele
column

Detector

Ele

Detector

Azimuth

. Fig. 17.6 Definitions of elevation angle and azimuthal angle


17.1 · Getting Started With NIST DTSA-II

Free download pdf