© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_18
265Qualitative Elemental Analysis
by Energy Dispersive X-Ray
Spectrometry
18
18.1 Quality Assurance Issues for Qualitative Analysis: EDS Calibration
Analysis: EDS Calibration – 266
18.2 Principles of Qualitative EDS Analysis
18.2.1 Critical Concepts From the Physics of Characteristic
X-ray Generation and Propagation – 26618.2.2 X-Ray Energy Database: Families of X-Rays – 269
18.2.3 Artifacts of the EDS Detection Process – 269
18.3 Performing Manual Qualitative Analysis
18.3.1 Why Are Skills in Manual Qualitative Analysis Important? – 275
18.3.2 Performing Manual Qualitative Analysis: Choosing
the Instrument Operating Conditions – 27718.4 Identifying the Peaks
18.4.1 Employ the Available Software Tools – 278
18.4.2 Identifying the Peaks: Major Constituents – 280
18.4.3 Lower Photon Energy Region – 281
18.4.4 Identifying the Peaks: Minor and Trace Constituents – 281
18.4.5 Checking Your Work – 281