Scanning Electron Microscopy and X-Ray Microanalysis

270

18

. Table 18.1 Comprehensive listing of all X-ray transitions for gold (DTSA-II database)

IUPAC Siegbahn Weight Energy (keV) Wavelength (Å)

Au K-N5 Au Kβ 4 0.0000 80.391 0.154226

Au K-N3 Au Kβ 2 0.0500 80.1795 0.154633

Au K-M5 Au Kβ 5 0.0005 78.5192 0.157903

Au K-M3 Au Kβ 1 0.1500 77.9819 0.158991

Au K-M2 Au Kβ 3 0.1500 77.5771 0.159821

Au K-L3 Au Kα 1 1.0000 68.8062 0.180193

Au K-L2 Au Kα 2 0.5000 66.9913 0.185075

Au L1-O4 Au L1O4/L1O5 0.0027 14.3445 0.864333

Au L1-O3 Au Lγ 4 0.0062 14.2991 0.867077

Au L1-O2 Au Lγ4p 0.0001 14.2811 0.86817

Au L1-O1 Au L1O1 0.0027 14.245 0.87037

SiC

E 0 = 20 keV

Coun

ts

350 000

300 000

250 000

200 000

150 000

100 000

50 000

0

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4

Photon energy (keV)

Photon energy (keV)

SiK-L

2,3

SiK-L

2,3

C K-L

C K-L

5 keV

10 keV

20 keV

. Fig. 18.4 EDS spectra of SiC: (upper) at E 0 = 20 keV, the C K-L 3 peak is barely visible; (lower) as the beam energy is lowered to reduce absorp-
tion, the C K-L 3 peak becomes more prominent (all spectra scaled to the Si K-L 3 region.)

Chapter 18 · Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry