Scanning Electron Microscopy and X-Ray Microanalysis

273 18

BaF 2

E 0 = 10 keV

Coun

ts

200 000

150 000

100 000

50 000

50 000

40 000

30 000

20 000

10 000

0

0

0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5

Counts

Photon energy (keV)

Photon energy (keV)

. Fig. 18.5 EDS spectrum of BaF 2 excited with a beam energy of 10 keV

Au

E 0 = 10 keV

Photon energy (keV)

Coun

ts

60 000

50 000

40 000

30 000

20 000

10 000

0

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0

. Fig. 18.6 EDS spectrum of Au excited with a beam energy of 10 keV

18.2 · Principles of Qualitative EDS Analysis