Scanning Electron Microscopy and X-Ray Microanalysis

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18


 DT









 DT
Fe


Fe


SiK+CaK

α , n

ot CrK

α

CaK

α

AlK+Ca


, not V


CaK

β

MgK
Al
O K K SiK

C
K

Fe

L

MgK

AlK
SiK

SiK+O K
O K not NaK

Photon energy keV

Counts

‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚‚,‚‚‚
‚,‚‚‚
ƒ‚,‚‚‚
„‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚,‚‚‚
‚

Coincidence
peaks

Coincidence
peaks

K mass frac
O
Mg
Al
Si
Ca
Fe

‚.ƒ
‚.„
‚.‚
‚.
‚.‚
‚.‚„„

‚.‚ .‚ .‚ .‚ .‚ .‚.‚ „.‚ƒ.‚ .‚‚.‚

. Fig. 18.10 EDS spectra of NIST glass K412 over a range of dead-times from 1 % to 66 %


Si-coincidence

Si
E 0 = 20 keV
1% deadtime

Photon energy (keV)

Photon energy (keV)

Counts

Coun

ts

10 00 000

100 000

10 000

1 000

100
0.0 0.5 1.0 1.5 2.0 2.53.0 3.54.0 4. 55 .0

0.0 0.5 1.0 1.5 2.0 2.53.0 3.54.0 4. 55 .0

4 000

3 000

2 000

1 000

0

. Fig. 18.9 EDS Spectrum of silicon at a dead-time of 1 %


Chapter 18 · Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry
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