Scanning Electron Microscopy and X-Ray Microanalysis

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. Fig. 18.13 a EDS spectrum of Al at E 0 = 20 keV; note symmetry of Al K-family peaks. b EDS spectrum of KBr at E 0 = 20 keV; note asymmetry of Br
L-family peaks. c EDS spectrum of W at E 0 = 20 keV; note asymmetry of W M-family peaks

Photon energy (keV)

Counts

10 00 000

800 000

600 000

400 000

200 000

0

1.00 1.10 1.20 1.30 1.40 1.50 1.60 1.70 1.80 1.90 2.00

Al

E 0 = 20 keV

Photon energy (keV)

Counts

KBr

E 0 = 20 keV

200 000

150 000

100 000

50 000

0

1.00 1.10 1.20 1.30 1.40 1.50 1.60 1.70 1.80 1.90 2.00

a

b

Counts

350 000

300 000

250 000

200 000

150 000

100 000

50 000

0

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4

Photon energy (keV)

W

E 0 = 20 keV

c

Chapter 18 · Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry