Scanning Electron Microscopy and X-Ray Microanalysis

286

18

confirmed by peak fitting procedures during quantitative

analysis.

6. The next peak matches the Al K-family (. Fig. 18.14i)
   but in this photon energy range only one peak is
   available for identification. The Br L-family also fits this
   peak (. Fig. 18.14j) but Br can be dismissed because of
   the absence of the Br K-family.
   7. The last significant peak is found to correspond to C K
   (. Fig. 18.14k) noting that due to the non- linearity of the
   photon energy scale for this detector below 400 eV, the
   peak is displaced to a lower energy from the ideal position.
   8. Finally, inspection of the remaining low peak-to-
   background peaks reveals just one candidate, which cor-
   responds to the Si K-family (. Fig. 18.14l).

Counts

10 000

1 000

100

10

1

0 2468101214161820

Photon energy (keV)

j

IN100

E 0 = 20 keV

8% deadtime

0.0 0.2 0.4 0.6 0.8

0

2 000

Counts

Counts

40 000

k

l

30 000

20 000

10 000

0

Photon energy (keV)

Photon energy (keV)

1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0

4 000

6 000

8 000

10 000

. Fig. 18.14 (continued)

Chapter 18 · Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry