Scanning Electron Microscopy and X-Ray Microanalysis

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Photon energy (keV)

Counts

E 0 = 5 keV

CrB 2

Fitting residual

35000

30000

25000

20000

15000

10000

5000

0

0.000.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00

Photon Energy (keV)

Counts

E 0 = 5 keV

CrB 2

CrB

Cr 2 B

B

50000

45000

40000

35000

30000

25000

20000

15000

10000

5000

0

0.000.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40 0.45 0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90 0.95 1.00

Cr

Cr

CrB 2 _5kV20nA10%DT

CrB 2 _5kV20nA10%DT

Residual_CrB 2 _5kV20nA10%DT

Cr 2 B_5kV20nA10%DT

CrB_5kV20nA10%DT

. Fig. 22.11 EDS spectra of chromium borides: CrB2, CrB and Cr 2 B (upper) and residual after peak fitting for B and Cr in CrB 2 (lower); E 0 = 5 keV

Photon energy (keV)

Counts

30000

25000

20000

15000

10000

5000

0

0.00 0.10 0.20 0.30

Simulation of Cr 3 C 2 _1_GLR_5kV25nASLOW38kH12DT_60s

Residual_Cr 3 C 2 _5kV25nA12%DT

0.40 0.50 0.60 0.70 0.80 0.90 1.00

E 0 = 5 keV

Cr 3 C 2

Fitting residual

. Fig. 22.12 EDS spectrum of chromium carbide, Cr 3 C 2 and residual after peak fitting for C and Cr; E 0 = 5 keV

Chapter 22 · Low Beam Energy X-Ray Microanalysis