Scanning Electron Microscopy and X-Ray Microanalysis

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23

Photon energy (keV)

Photon energy (keV)

Counts

Counts

K411

E 0 = 15 keV

Flat bulk

Shard A

Shard C

Shard D

Shard E

100000

10000

1000

100

10

0.0 1.0 2.0 3.0 4.0 5.06.0 7.08.0 9.0 10.0

0.0 1.0 2.0 3.0 4.0 5.06.0 7.08.0 9.0 10.0

4000

3000

2000

1000

0

K411_FLAT_15kV

K411_SHARDA_15kV

K411_SHARDC_15kV

K411_SHARDD_15kV

K411_SHARDE_15kV

K411_FLAT_15kV

K411_SHARDA_15kV

K411_SHARDC_15kV

K411_SHARDD_15kV

K411_SHARDE_15kV

. Fig. 23.13 EDS spectra of K411 glass in the flat polished condition, and from four shards, showing the deviation in the spectral shape from the
ideal; E 0 = 20 keV

Extreme rough surfaces

Beam

BSE

EDS

. Fig. 23.14 SEM (ET+) SE + BSE image of an irregular surface and schematic illustration of electron backscattering from a tilted surface causing
remote X-ray excitation

Chapter 23 · Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles