Scanning Electron Microscopy and X-Ray Microanalysis

397 23

Intensitycounts

a

b

130000 120000 110000 100000 90000 80000 70000 60000 50000 40000 30000 20000 10000 0 0 Photon energy (eV)

E 0 = 5 keV

200 400 600 800 1000 1200 1400 1600 1700 2000 2200 2400

400000 350000 300000 250000 200000 150000 100000 50000 0 0 Photon energy (eV)

E 0 = 10 keV

200 400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

c 280000 260000 240000 220000 220000 180000 160000 140000 120000 100000 80000 60000 40000 20000 0 0 Photon energy (eV)

E 0 = 20 keV

200 400 600 800 1000 1200 1400 1600 1800 2000 2200 2400

Intensitycounts

d 220000 200000 180000 160000 140000 120000 100000 80000 60000 40000 20000 0 0 Photon energy (eV)

E 0 = 30 keV

200 400 600 700 1000 1200 1400 1600 1800 2000 2200 2400

Intensitycounts

Noisy[MC simulation of a 1.000 mm diameter sphere of Al on] 5keV

Noisy[MC simulation of a 1.000 mm diameter sphere of Al on C] 10keV

. Fig. 23.20 EDS spectra calculated with the DTSA-II Monte Carlo
simulation for a 1-μm-diameter Al particle on a C substrate at vari-
ous beam energies: a 5 keV, b 10 keV, c 20 keV, and d 30 keV. Note the

absence of the C peak from the substrate at E 0 = 5 keV, its appearance at E 0 = 10 keV and the increase relative to the Al peak as the beam energy increases

23.6 · Particle Analysis

Scanning Electron Microscopy and X-Ray Microanalysis

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