Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_25

4 41

Attempting Electron-Excited

X-Ray Microanalysis

in the Variable Pressure

Scanning Electron Microscope

(VPSEM)

25

25.1 Gas Scattering Effects in the VPSEM – 442

25.1.1 Why Doesn’t the EDS Collimator Exclude the 

Remote Skirt X-Rays? – 446

25.1.2 Other Artifacts Observed in VPSEM X-Ray Spectrometry – 448

25.2 What Can Be Done To Minimize gas Scattering

in VPSEM? – 450

25.2.1 Workarounds To Solve Practical Problems – 451

25.2.2 Favorable Sample Characteristics – 451

25.2.3 Unfavorable Sample Characteristics – 456

References – 459