Scanning Electron Microscopy and X-Ray Microanalysis

453 25

3453

a

Ch kV; Work: 51

SiKa

Ka

Ka

MgKa

S Ka

K Ka

CaKa

Ti Ka FeKa

Ti Kb1 FeKb1

O

Particle “A”

Al Ka

C

0.00

Photon energy (keV)

1.00 2.00 3.00 4.00 5.00 6.00 7.00 8.00 9.00 10.00

Ch#: 261 2.6100 Results: 0 Marker:Fe 26

A

B

C

D

E

BL1

BL2

BL3

CaKa

FeKa

Operational blank at “BL1”

C

(^1396) Ch#:
Al Ka
Si Ka
O
0.00
Photon energy (keV)
1.00 2.00 3.00 4.00 5.00 6.00 7.008.00 9.0 01 0.00
ka
ChkV: Work: 101 Results: 0 Marker:Fe 26
Ka
274 2.7400
A
B
C
D
E
BL1
BL2
BL3
b
CaKa
FeKa
Operational blank at “BL 1 ”
C
Ch:
Al Ka
Si Ka
O
ka
ChkV:: Work: 101 Results: 0 Marker:Fe 26
Ka
A
B
C
D
E
BL 1
BL 2
BL 3
25.2 · What Can Be Done To Minimize gas Scattering in VPSEM?