Scanning Electron Microscopy and X-Ray Microanalysis

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25

AI K-L 2

E 0 = 20 keV

133 Pa

1330 Pa 2000 Pa

665 Pa

a

Ni K-L 2

E 0 = 20 keV

133 Pa

1330 Pa

2000 Pa

50 μm

50 μm

665 Pa

b

. Fig. 25.16 a Elemental intensity map for Al K-L 2 at various pressures (E 0 = 20 keV, water vapor and 6-mm gas path length). b Elemental intensity
map for NiKα at various pressures (E 0 = 20 keV, water vapor and 6-mm gas path length)

Chapter 25 · Attempting Electron-Excited X-Ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VPSEM)