Scanning Electron Microscopy and X-Ray Microanalysis

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J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_3

29

Secondary Electrons

3

3.1 Origin – 30

3.2 Energy Distribution – 30

3.3 Escape Depth of Secondary Electrons – 30

3.4 Secondary Electron Yield Versus Atomic Number – 30

3.5 Secondary Electron Yield Versus Specimen Tilt – 34

3.6 Angular Distribution of Secondary Electrons – 34

3.7 Secondary Electron Yield Versus Beam Energy – 35

3.8 Spatial Characteristics of Secondary Electrons – 35

References – 37

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