Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_30

517

Focused Ion Beam Applications

in the SEM Laboratory

30

30.1 Introduction – 518

30.2 Ion–Solid Interactions – 518

30.3 Focused Ion Beam Systems – 519

30.4 Imaging with Ions – 520

30.5 Preparation of Samples for SEM – 521

30.5.1 Cross-Section Preparation – 522

30.5.2 FIB Sample Preparation for 3D Techniques and Imaging – 524

30.6 Summary – 526

References – 528