Scanning Electron Microscopy and X-Ray Microanalysis

58

4

Photoelectric absorption reduces the X-ray intensity that

is emitted from the target at all photon energies. The absorp-

tion loss from each layer of the φ(ρz) distribution is calcu-

lated using Eq. 4.15 with the absorption path, s, determined as

shown in. Fig. 4.21a from the depth, d, of the histogram

slice, and the cosecant of the X-ray detector “take-off angle,”

ψ, which is the elevation angle of the detector above the

target surface:

. Fig. 4.21 a Determination of the absorption path length from a layer of the φ(ρz) distribution located at depth, d, in the direction of the X-ray
detector. b Monte Carlo determination of the φ(ρz) distribution and absorption for carbon at various beam energies. (Joy Monte Carlo simulation)

EDS

S

a

d

Phiroz

f[chi]

Phiroz

f[chi]

Phiroz

f[chi]

b

Phiroz

f[chi]

Chapter 4 · X-Rays