233 16
75,000
Brem counts
70,000
65,000
60,000
55,000
50,000
45,000
40,000
35,000
30,000
25,000
20,000
15,000
10,000
10/13/11
10,06
10,05
10,04
10,03
10,02
10,01
10,00
9,99
9,98
9,97
Cu Kα
10/13/11 6/1/12 1/18/13 9/7/13 4/26/14 12/14/14 8/2/15
Channel width
6/1/12 1/18/13 9/7/13 4/26/14 12/14/14 8/2/15 3/21/16
Brem Counts
Channel width
Quality Control Report - May 27, 2016
NIST DTSA-II Version Iona 2015-08-24
EPQ Version Iona 2015-08-24
Detector Detector 0 - FWHM[Mn Ka]=128.0 eV - initial
Beam Energy 20.0 keV
Material Pure copper
Operator nritchie
Item Value
6/14/16
3/21/166/14/16
. Fig. 16.30 Quality control report charts
133.0
132.5
132.0
131.5
131.0
130.5
130.0
FWHM(eV
)
0 0.2 0.4 0.6 0.8 1 1.2 1.4
Probe current (nA)
eV/channel
FWHM Gain
10.004
10.003
10.002
10.001
10.000
9.999
9.998
9.997
9.996
9.994
9.995
. Fig. 16.31 Neither the resolu-
tion (FWHM at Mn K-L2,3 (Kα)) or
the gain (in eV/channel) should
change with probe current
16. 3 · Practical Aspects of Ensuring EDS Performance for a Quality Measurement Environment