Scanning Electron Microscopy and X-Ray Microanalysis

259 17

. Fig. 17.41 Simulation results: X-ray spectrum

Simulation mode

Simulation Configuration

Material

Sample rotation

Sample tilt

Beam energy

Probe dose

Instrument

Detector

Calibration

Overscan

Vacuum conditions

Replicas (with poisson noise)

Monte Carlo model of a bulk sample

Anorthite

Element

O

AI

Si

Ca

0.0°

0.0°

15.0 keV

SDD (Medium, 4096)

FWHM[Mn Kα]=130.8 eV - 2014-02-18 00:00

False

High vacuum

1

60.0 nA.s

MIRA-3

0.4601

0.1940

0.2019

0.1441

0.4601 0.6154

0.1538

0.1538

0.0769

0.1940

0.2019

0.1441

Mass

Fraction

Mass Fraction

(normalized)

Atomic

Fraction

. Fig. 17.42 Simulation results:
configuration record

17.2 · Simulation in DTSA-II