Scanning Electron Microscopy and X-Ray Microanalysis

(coco) #1
© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_20

309

Quantitative Analysis:


The SEM/EDS Elemental


Microanalysis k-ratio Procedure


for Bulk Specimens,


Step-by-Step


20


20.1 Requirements Imposed on the Specimen and Standards


and Standards – 311


20.2 Instrumentation Requirements


20.2.1 Choosing the EDS Parameters – 311
20.2.2 Choosing the Beam Energy, E 0 – 313
20.2.3 Measuring the Beam Current – 313
20.2.4 Choosing the Beam Current – 314

20.3 Examples of the k-ratio/Matrix Correction Protocol with DTSA II


Protocol with DTSA II – 316


20.3.1 Analysis of Major Constituents (C > 0.1 Mass Fraction)
with Well- Resolved Peaks – 316
20.3.2 Analysis of Major Constituents (C > 0.1 Mass Fraction)
with Severely Overlapping Peaks – 318
20.3.3 Analysis of a Minor Constituent with Peak Overlap
From a Major Constituent – 319
20.3.4 Ba-Ti Interference in BaTiSi 3 O 9 – 319
20.3.5 Ba-Ti Interference: Major/Minor Constituent Interference
in K2496 Microanalysis Glass – 319

20.4 The Need for an Iterative Qualitative and 


Quantitative Analysis Strategy – 319


20.4.1 Analysis of a Complex Metal Alloy, IN100 – 320
20.4.2 Analysis of a Stainless Steel – 323
20.4.3 Progressive Discovery: Repeated Qualitative–Quantitative Analysis
Sequences – 324

20.5 Is the Specimen Homogeneous?

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