Scanning Electron Microscopy and X-Ray Microanalysis

315 20

. Fig. 20.3 SDD-EDS spectra of NIST SRM (glass K412, E 0 = 20 keV: a, b at 3 % dead-time (red); c 3 % (red) and 29 % dead-time (blue), showing
in-growth of coincidence peaks

Counts

Photon energy (keV)

SRM470 Glass K412

E 0 = 20 keV

Deadtime = 3%

3 500 000

3 000 000

2 500 000

2 000 000

1 500 000

1 000 000

5 000 000

0

0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

a

Counts

Photon energy (keV)

100 000

80 000

60 000

40 000

20 000

0

0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

Si+O Si+Mg; Al+Al

Si+Si

Mg+CaSi+Ca

SRM470 Glass K412

E 0 = 20 keV

Deadtime = 3%

Deadtime = 29%

Counts

Photon energy (keV)

0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

b

c

K412_20kV5nAMED5eV40kHz3DT_5ks

K412_20kV5nAMED5eV40kHz3DT_5ks

K412_20kV5nA40kHz_3DT

K412_20kV50nA387kHz_29DT

20.2 · Instrumentation Requirements