Scanning Electron Microscopy and X-Ray Microanalysis

11 1

Cu

0° tilt

500 nm

30 keV

20 keV

10 keV

5 keV

0.0 nm

0.0 nm

233.5 nm

466.9 nm

700.4 nm

933.8 nm

-680.0 nm -340.0 nm 0.0 nm 340.0 nm 680.0 nm

432.6 nm

865.2 nm

1297.8 nm

1730.4 nm

-1260.0 nm -630.0 nm 0.0 nm 630.0 nm 1260.0 nm

. Fig. 1.9 Monte Carlo simula-
tions for Cu, 0° tilt, incident beam
energies 5, 10, 20, and 30 keV
(CASINO Monte Carlo simulation)

1.4 · Simulating the Effects of Elastic Scattering: Monte Carlo Calculations