Scanning Electron Microscopy and X-Ray Microanalysis

14

1

References

Bethe H (1930) Theory of the transmission of corpuscular radiation

through matter. Ann Phys Leipzig 5:325

CASINO 7 http://www.gel.usherbrooke.ca/casino/What.html

Joy Monte Carlo 7 http://web.utk.edu/~srcutk/htm/simulati.htm

Kanaya K, Okayama S (1972) Penetration and energy-loss theory of elec-

trons in solid targets. J Phys D Appl Phys 5:43

NIST DTSA-II 7 http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.

html

12000

C

Al

Ag

Au

Cu

10000

8000

6000

4000

2000

0

510215 0325 0

Incident beam energy (keV)

kanaya-okayama range

Range (nm)

. Fig. 1.12 Kanaya–Okayama
range plotted for C, Al, Cu, Ag and
Au as a function of E 0

Chapter 1 · Electron Beam—Specimen Interactions: Interaction Volume