Scanning Electron Microscopy and X-Ray Microanalysis

371 22

Photon energy (keV)

Counts

BaCl 2

E 0 = 5 keV

35000

140000

120000

100000

80000

60000

40000

20000

0

30000

25000

20000

15000

10000

5000

0

0.0

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0

0.5 1.0 1.5 2.0 2.5 3.0 3.5

BaCl 2 _5kV25nA4%DT

BaCl 2 _5kV25nA4%DT

BaCO 3 _5kV30nA4%DT

BaF 2 _5kV30nA4%DT

4.0 4.5 5.0

Counts

Photon energy (keV)

E 0 = 5 keV

BaCl 2

BaF 2

BaCO 3

. Fig. 22.16 EDS spectrum of barium chloride, showing the Ba M-family (upper); EDS spectra of BaCl 2 , BaF 2 , and BaCO 3 (lower); E 0 = 5 keV

Photon energy (keV)

Counts

60000

50000

40000

30000

20000

10000

0

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.4

E 0 =2.5 keV

YBa 2 Cu 3 O 7 -X

Fitting residual

123TC_2.5kV50nA3%DT

Residual_123TC_2.5kV50nA3%DT

. Fig. 22.17 EDS spectrum of YBa 2 Cu 3 O7-X, and residual after peak fitting for O K-L2, the Ba M-family and Cu L-family; E 0 = 2.5 keV

22.3 · Challenges and Limitations of Low Beam Energy X-Ray Microanalysis