Scanning Electron Microscopy and X-Ray Microanalysis

401 23

K411

15-μm sphere (20 nm C film on Cu grid)

E 0 = 20 keV

Beam position: Top Center

Beam position: R/2, toward EDS

100000

10000

1000

Counts

Counts

100

10

0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

6000

5000

4000

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100

0

0.0 1.0 2.0 3.0 4.0 5.0

Photon energy (keV)

Photon energy (keV)

6.0 7.0 8.0 9.0 10.0

K411_sphere_beam-top-center_20kV10nA

K411_sphere_r/2_toward_20kV10nA

K411_sphere_beam-top-center_20kV10nA

K411_sphere_r/2_toward_20kV10nA

. Fig. 23.25 Comparison of EDS spectra recorded at the top center and on the side facing the EDS

Location Mg rel err % Si rel err % Ca rel err % Fe rel err %

R/2 toward (^) 29 %6 % -19 %-24 %
Top Center 9 %3 % -5 %-8 %
R/2 away -27 % -8 % 27 % 36 %
EDS
5 mm

. Fig. 23.26 Quantitative
analysis performed at the static
beam locations indicated; relative
errors observed for the normal-
ized concentrations (oxygen cal-
culated by stoichiometry)

23.6 · Particle Analysis