Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_24

413

Compositional Mapping

24

24.1 Total Intensity Region-of-Interest Mapping – 414

24.1.1 Limitations of Total Intensity Mapping – 415

24.2 X-Ray Spectrum Imaging – 417

24.2.1 Utilizing XSI Datacubes – 419

24.2.2 Derived Spectra – 419

24.3 Quantitative Compositional Mapping – 424

24.4 Strategy for XSI Elemental Mapping Data Collection – 430

24.4.1 Choosing the EDS Dead-Time – 430

24.4.2 Choosing the Pixel Density – 432

24.4.3 Choosing the Pixel Dwell Time – 434

References – 439