Scanning Electron Microscopy and X-Ray Microanalysis

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c

d

a b

. Fig. 30.14 Image reconstruction of a plated stainless steel test
coupon. Each section was milled perpendicular to the sample surface.
These reconstructions were made from a series of 360 milled slices and
required approximately 3 h to collect. The width of the milled area is
20  μm. a A secondary electron image of one milled cross section that
is the green orientation shown in d. This image does not need to be


reconstructed as it is the collected data. b Reconstructed slice along
the red plane shown in d. This image is reconstructed once the slice
thickness is known. The resolution in this direction is limited by the FIB
milled slice thickness. c This is a reconstructed image of a slice parallel
to the sample surface shown in blue in d. d Schematic of milled volume

30.6 · Summary

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