Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_31

529

Ion Beam Microscopy

31

31.1 What Is So Useful About Ions? – 530

31.2 Generating Ion Beams – 533

31.3 Signal Generation in the HIM – 534

31.4 Current Generation and Data Collection in the HIM – 536

31.5 Patterning with Ion Beams – 537

31.6 Operating the HIM – 538

31.7 Chemical Microanalysis with Ion Beams – 538

References – 539