Scanning Electron Microscopy and X-Ray Microanalysis

531 31

HIM SEM

1μm 1μm

50 nm

a

b

. Fig. 31.2 a Gold islands on
carbon as viewed by SEM and
HIM under optimized conditions
for each method: SEM (20-pA
beam current at 1 keV); HIM (1-pA
beam current at 30 keV). b High
magnification HIM image of gold
on carbon sample with lacey
contamination visible. Field of
View is 200 nm (Image acquired
by Shawn McVey using the ORION
Plus HIM) (Image courtesy of Carl
Zeiss)

50 nm

20 nm

SEM 30 keV ORION

HIM 30 keV

Electrons He ions-solid surface

. Fig. 31.3 SEM and HIM images
of soft material (polymer fibers)

31.1 · What Is So Useful About Ions?