Microfluidics for Biologists Fundamentals and Applications

1000

800

600

400

200

0

Load (μN)

Displacement (nm)

0 100 200 300 400

Hold Time

Loading Unloading

ab

c

Fig. 2.18 (a) Fabrication flow chart for the process used (b) FESEM image of Al microcantilever
78 μm long and 28μm width (c) Force displacement characterization on a nanoindenter

Fig. 2.19 Interdigitated
cantilevers placed in
microfluidic channel

56 G. Bhatt et al.

http://www.ebook3000.com