frequency shift to increase the sensitivity and eliminate the frequency tracking
elements from the sensor has been reported by Kumar et al. [132].
Gupta et al. used silicon cantilevers to detect bacterial cells (Listeria cells) and
viruses (vaccinia virus) (Fig.2.37). Single virus detection was carried out on
4–5μm long, 1–2μm wide and 20–30 nm thick cantilevers [133, 134]. Detection
of Bacillus anthracis spores in air and water using a planar rectangular shaped
cantilever was demonstrated by Davilia et al. [135].
BioMEMS have made a significant impact on clinical diagnostics and the
affordability of these devices. They are being used for detection of protein, DNA,
detection of cancer, HIV and other infectious diseases. They have enabled low-cost,
rapid and point-of-care diagnostic of diseases allowing early and better diagnosis.
References
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clinical diagnostics on human physiological fluids. Lab Chip 4:30–315
4.http://www.drdo.gov.in/drdo/data/Laser%20and%20its%20Applications - Robert M, Rossier J, Bercier P, Girault H (1997) UV laser machined polymer substrates for
the development of microdiagnostic systems. Anal Chem 69:2035 - Hellaman A, Rau K, Yoon H, Bae S, Palmer J, Philips K, Albritton N, Venugopal V (2007)
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Fig. 2.37 SEM image
showing the cantilever with
a vaccinia virus particle
(Reproduced from Gupta
et al. [133] with permission
from the American Institute
of Physics)
2 Microfluidics Overview 77