Scanning Electron Microscopy and X-Ray Microanalysis

© Springer Science+Business Media LLC 2018

J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,

https://doi.org/10.1007/978-1-4939-6676-9_7

111

SEM Image Interpretation

7

7.1 Information in SEM Images...............................................................................................................................................

7.2 Interpretation of SEM Images of Compositional Microstructure

Microstructure – 112

7.2.1 Atomic Number Contrast With Backscattered Electrons – 112

7.2.2 Calculating Atomic Number Contrast – 113

7.2.3 BSE Atomic Number Contrast With the Everhart–Thornley

Detector – 113

7.3 Interpretation of SEM Images of Specimen Topography

Topography – 114

7.3.1 Imaging Specimen Topography With the 

Everhart–Thornley Detector – 115

7.3.2 The Light-Optical Analogy to the SEM/E–T (Positive Bias)

Image – 116

7.3.3 Imaging Specimen Topography With a Semiconductor

BSE Detector – 119

References – 121