© Springer Science+Business Media LLC 2018
J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis,
https://doi.org/10.1007/978-1-4939-6676-9_10
147High Resolution Imaging
10
10.1 What Is “High Resolution SEM Imaging”?
10.2 Instrumentation Considerations
10.3 Pixel Size, Beam Footprint, and Delocalized Signals
10.4 Secondary Electron Contrast at High Spatial Resolution
10.4.1 SE range Effects Produce Bright Edges (Isolated Edges) – 151
10.4.2 Even More Localized Signal: Edges Which Are Thin Relative
to the Beam Range – 15210.4.3 Too Much of a Good Thing: The Bright Edge Effect Can Hinder
Distinguishing Shape – 15310.4.4 Too Much of a Good Thing: The Bright Edge Effect Hinders Locating
the True Position of an Edge for Critical Dimension Metrology – 15410.5 Achieving High Resolution with Secondary Electrons
10.5.1 Beam Energy Strategies – 156
10.5.2 Improving the SE 1 Signal – 158
10.5.3 Eliminate the Use of SEs Altogether: “Low Loss BSEs“ – 161
10.6 Factors That Hinder Achieving High Resolution
10.6.1 Achieving Visibility: The Threshold Contrast – 163
10.6.2 Pathological Specimen Behavior – 163
10.6.3 Pathological Specimen and Instrumentation Behavior – 164