Scanning Electron Microscopy and X-Ray Microanalysis

549

• sets of 309


• uncertainties in 309


• waters of crystallization 311


• ZAF factors, microanalysis 317–324
  k-ratio/matrix correction protocol


• alkali element migration 349–353


• Ba-Ti interference 337–338


• beam-sensitive specimens 349


• complex metal alloy, IN100 340, 341


• with DTSA II 333–334


• Hall method 353–356


• instrumentation requirements 328


• iterative qualitative and quantitative analysis
  strategy 338–339


• major constituents 334–336


• repeated qualitative–quantitative analysis
  sequences 343–347


• specimen and standards 328


• specimen homogeneous 347–349


• stainless steel 340–343

L

Landing energy 79
Lead-acid battery plate reactions 494–495
Light-optical analogy, Everhart–Thornley
(positive bias) detector 131–133
Long-range secondary X-ray fluorescence 364
Low beam energy SEM

• backscattered electron signal
  characteristics 182–185


• constituent 182


• extremely low beam energy imaging 187


• high depth resolution SEM 185–186


• for high lateral resolution SEM 185


• Kanaya–Okayama range 182


• secondary electron 182–185
  Low beam energy X-ray microanalysis


• advantage of
  
  
  • improved spatial resolution 381–382
  
  
  • low atomic number elements 382–385
  
  
  • reduced matrix absorption correction 382
  
  
  
  


• challenges and limitations
  
  
  • reduced access to elements 385–387
  
  
  • surface layers 388–393
  
  
  • vertical heterogeneity 387–388
  
  
  
  


• constitutes 376–380


• low beam energy analysis range 381


• peak selection strategy 380–381

M

Magnification vs. pixel dimension 163
Manganese nodule 483–488
Modeled detectors

• aluminum layer 261–263


• azimuthal angle 261


• crystal thickness 261


• dead layer 263


• detector area 261


• elevation angle 261


• energy scale 261


• gold layer 261–263


• material editor dialog 264–266


• Mn Kα, resolution at 261


• nickel layer 261–263


• number of channels 261
  
  
  • optimal working distance 259–260
  
  
  • panel containing properties 256, 257
  
  
  • sample-to-detector distance 261
  
  
  • window type 258–259
  
  
  • zero offset 261
  
  
  • zero strobe discriminator 263
    Monte Carlo calculations
  
  
  • beam electron interaction volume 7–8
  
  
  • composition 8–9
  
  
  • electron interaction volume 7
  
  
  • electron trajectory simulation 4–5
  
  
  • incident beam energy 9–10
  
  
  • Monte Carlo simulation (CASINO
    simulation) 5–7
  
  
  • size of the interaction volume 11–12
  
  
  • specimen tilt 10–11
    Monte Carlo electron trajectory
    simulation 4–5
    Monte Carlo simulation 5–7
  
  
  • DTSA-II EDS software 267
  
  
  • X-ray generation 62–63
  
  
  
  

N

National Institutes of Health (NIH) 204

NIST DTSA II simulation 364

O

Open Microscopy Environment

(OME) 204

Overscanning 414

P

Particle absorption effect 415–420

Particle analysis

• optimum spectra 410–414


• quantitative analysis of particles 415–420


• uncertainty in 420–422


• X-ray measurements 408–410


• X-ray spectrum imaging (XSI) 414–415
  Particle mass effect 415
  Particle sample preparation 413–414
  Plugins 206–209

Q

Quantitative compositional mapping,

436–441

R

Robust light-optical analogy 131

S

Scanning electron microscope (SEM)

• compositional microstructure ix


• crystal structure xii–xiii


• dual-beam platforms, combined electron
  and ion beams xiii–xiv


• electron-optical parameters vii–ix


• elemental composition x–xii


• specimen property information ix–x
  
  
  • three-dimensional structure ix–x
  
  
  • topography ix, x
    Scanning electron microscope (SEM) image
    interpretation
  
  
  • compositional microstructure
    
    
    • atomic number contrast, calculation
      127–128
    
    
    • atomic number contrast with backscattered
      electrons 126–127
    
    
    • BSE atomic number contrast with
      Everhart–Thornley detector 128
    
    
    
    
  
  
  • information in 126
  
  
  • specimen topography 128–129
    
    
    • Everhart–Thornley detector 129–130
    
    
    • light-optical analogy 130–133
    
    
    • with semiconductor BSE detector
      133–136
      Scanning electron microscope (SEM) images
    
    
    
    
  
  
  • Rose visibility criterion 139
  
  
  • signal quality 138–145
  
  
  • signal-to-noise ratio 138
    Scanning electron microscope (SEM) imaging
    checklist
  
  
  • beam current
    
    
    • high resolution imaging 214
    
    
    • low contrast features 214
    
    
    
    
  
  
  • beam energy
    
    
    • compositional contrast with backscattered
      electrons 213
    
    
    • high resolution SEM imaging 214
    
    
    • topographic contrast with backscattered
      electrons 213
    
    
    • topographic contrast with secondary
      electrons 213
    
    
    
    
  
  
  • electron detector
    
    
    • backscattered electron detectors 213
    
    
    • Everhart–Thornley detector 213
    
    
    
    
  
  
  • electron signals available
    
    
    • backscattered electrons 212
    
    
    • beam electron range 212
    
    
    • secondary electrons (SEs) 212–213
    
    
    
    
  
  
  • image interpretation
    
    
    • annular BSE detector 215
    
    
    • contrast encoding 215
    
    
    • direction of illumination 214
    
    
    • Everhart–Thornley detector 215
    
    
    • observer’s point of view 214
    
    
    • semiconductor BSE detector 215
    
    
    
    
  
  
  • image presentation
    
    
    • live display adjustments 214
    
    
    • post-collection processing 214
    
    
    
    
  
  
  • specimen considerations 212
  
  
  • VPSEM 215
    Scanning electron microscope (SEM)
    instrumentation
  
  
  • detective quantum efficiency (DQE)
    101–103
  
  
  • detector characteristics
    
    
    • bandwidth 97
    
    
    • electron detectors, angular
      measures for 96–97
    
    
    • energy response 97
    
    
    
    
  
  
  • electron beam parameters 78
  
  
  • electron detectors
    
    
    • abundance 95
    
    
    • angular distribution 95
    
    
    • backscattered electrons 97–99
    
    
    • kinetic energy response 95–96
    
    
    
    
  
  
  
  

AE–SP
Index