Scanning Electron Microscopy and X-Ray Microanalysis

548

Energy dispersive X-ray spectrometry (EDS) xi

• adequate counts 297–298


• beam current 330–332


• beam energy 297, 330


• coincidence peaks 294–295


• detection process
  
  
  • coincidence peaks 231–233
  
  
  • peak broadening 228–231
  
  
  • Si absorption edge 233–234
  
  
  • Si-escape peak 231
  
  
  • Si internal fluorescence peak 233–234
  
  
  
  


• detector dead-time 297


• detector time constant 297


• electron-excited EDS operation
  
  
  • beam current 235–237
  
  
  • channel width and number 235
  
  
  • EDS time constant 234
  
  
  • solid angle 235
  
  
  
  


• exciting characteristic X-rays 287–288


• fluorescence yield 288


• lower photon energy region 300–301


• manual peak identification 301–305


• manual qualitative analysis 296–297


• minor and trace constituents 301


• parameters
  
  
  • calibration 330
  
  
  • solid angle 330
  
  
  • spectrum channel energy width
    328–329
  
  
  • spectrum energy span 328–329
  
  
  • time constant 329–330
  
  
  
  


• pathological electron scattering
  
  
  • trace analysis artifacts 364–369
  
  
  
  


• peaks, identifying 299


• principles, qualitative EDS analysis 287


• QC project 246–249


• QC tools within DTSA-II 246


• quality assurance issues 286


• quality measurement environment
  
  
  • detector geometry 237–240
  
  
  • detector orientation 240–245
  
  
  • energy calibration linearity 245
  
  
  • optimal working distance 240
  
  
  • process time 240
  
  
  
  


• Si escape peak 293


• silicon drift detector (SDD)
  
  
  • low X-ray flux 250–251
  
  
  • moderate resolution 251
  
  
  • output count rate with live-time dose
    249–250
  
  
  • resolution and peak position stability 250
  
  
  
  


• software tools 298–299


• trace level measurement 363–364


• X-ray absorption 288–289


• X-ray energy database 289–292
  Energy distribution, backscattered
  electrons 29–30
  EPMAs. See Electron probe microanalyzers
  (EPMAs)
  Everhart–Thornley detector 99–100, 128,
  129–130, 213, 215

F

Fiji 204–206
Focused ion beams (FIB), xiii

• cross-section preparation 530–532


• focused ion beam systems 527–528
  
  
  • imaging with ions 528–529
  
  
  • ion–solid interactions 526–527
  
  
  • SEM, sample preparation 530
  
  
  • 3D techniques and imaging 532–536
  
  
  
  

G

Geometric factors

• bulk specimens 396–397


• electron-excited X-ray microanalysis 398


• useful indicators of
  
  
  • EDS spectrum 404–406
  
  
  • raw analytical total 401–404
  
  
  • rough bulk samples 406–408
    Graphical user interface (GUI) 90, 204
  
  
  
  

H

Hard-facing alloy bearing surface 480–482

Helium ion microscope (HIM) xiv

High resolution imaging

• achieving visibility 178


• beam footprint 162–164


• delocalized signals 162–164


• instrumentation considerations 162


• pathological specimen and instrumentation
  behavior
  
  
  • contamination 179
  
  
  • instabilities 179
  
  
  
  


• pathological specimen behavior 178–179


• pixel size 162–164


• secondary electron contrast 164–165
  
  
  • beam range 167
  
  
  • bright edge effect 167
  
  
  • critical dimension metrology 167–169
  
  
  • isolated edges 165–167
  
  
  
  


• with secondary electrons 169–171
  
  
  • beam energy strategies 171–173
  
  
  • low loss BSEs 176–178
  
  
  • SE 1 signal 173–176
  
  
  
  


• SEM 162
  HIM. See Helium ion microscope (HIM)

I

Image defects

• charging
  
  
  • control charging artifacts 153–155
  
  
  • define 148–149
  
  
  • in SEM images 149–152
  
  
  
  


• contamination 157–158


• image defocusing (blurring) 113–117


• Moiré effects 158–159


• projection distortion (foreshortening)
  111–113


• radiation damage 155–157
  Image formation


• calibrating the image 107–109


• image defects
  
  
  • image defocusing (blurring) 113–117
  
  
  • projection distortion (foreshortening)
    111–113
  
  
  
  


• image dimensions 107


• ImageJ-Fiji, calibrated structure in 109–110


• ImageJ-Fiji, routine linear measurements
  with 110


• magnification 107
  
  
  • scale bars 107
  
  
  • by scanning action 106–107
  
  
  • stereomicroscopy
    
    
    • qualitative stereomicroscopy 118–121
    
    
    • quantitative stereomicroscopy 121–124
    
    
    • surface measurement 117–118
      ImageJ-Fiji
    
    
    
    
  
  
  • calibrated structure in 109–110
  
  
  • routine linear measurements with 110
    ImageJ universe 204
    Imaging crystalline materials
  
  
  • acquired data 512–513
  
  
  • application 518–521
  
  
  • cleaning EBSD data 516–517
  
  
  • electron channeling contrast
    
    
    • electron backscattering diffraction
      (EBSD) 504–512
    
    
    • instrument conditions 504
    
    
    • specimen preparation 504
    
    
    
    
  
  
  • map components 513–516
  
  
  • polycrystalline materials 502–503
  
  
  • single crystals 500–502
  
  
  • transmission Kikuchi diffraction (TKD)
    517–518
    Incident beam energy 9–10
    Ink-Jet printer deposits 224–226
    International Union of Pure and Applied
    Chemistry (IUPAC) 51
    Ion beam microscopy
  
  
  • chemical microanalysis 546
  
  
  • generating ion beams 541–542
  
  
  • helium ion microscope (HIM)
    
    
    • current generation and data
      collection 543–545
    
    
    • operating the 545–546
    
    
    • patterning with 545
    
    
    • signal generation in 542–543
    
    
    
    
  
  
  • patterning with ion 545
  
  
  • usefulness 538–541
  
  
  
  

J

Java Runtime Environment (JRE) 205

K

Kanaya–Okayama range 11–12, 60, 182

k-ratio

• analytical total 310


• converting sets of 310


• define 308–309


• element by difference 311


• estimate CZ 310–311


• matrix corrections 316–317


• matrix effects, physical origin of 317


• normalization 310


• oxygen by assumed stoichiometry 311


• quantitative electron-excited X-ray
  microanalysis
  
  
  • standardless analysis 314–316
  
  
  • standards-based k-ratio protocol
    313–314
  
  
  
  


• reporting composition
  
  
  • atomic fraction 312
  
  
  • mass fraction 311–312
  
  
  • oxide fractions 312–313
  
  
  • stoichiometry 312
  
  
  
  

Index