Scanning Electron Microscopy and X-Ray Microanalysis

60

4

. Fig. 4.22 a Absorption parameter f(χ) as a function of
photon energy for carbon and an incident beam energy
of E 0 = 20 keV. Note the abrupt decrease for photons
just above the ionization energy of carbon at 0.284 keV.
b Expansion of the region from 0 to 5 keV. Note the abrupt
decrease for photons just above the ionization energy
of carbon at 0.284 keV. c Comparison of the generated
(black) and emitted (red) X-ray spectra for carbon with an
incident beam energy of E 0 = 20 keV

1.0

a

0.8

0.6

0.4

0.2

0.0

510

Photon energy (keV)

15 20

Absorption parameter f(χ) for C, E 0 = 20 keV

f(χ

)

Absorption parameter f(χ) for C, E 0 = 20 keV

1.0

0.8

0.6

0.4

0.2

0.0

f(χ

)

0 1

0

23

Photon energy (keV)

45

b

1e+8

c Generated and emitted X-ray spectra for carbon

1e+7 E 0 = 20 keV

1e+6

1e+5

1e+4

1e+3

Intensit

y

1e+2

1e+1

1e+0

0510

X-ray photon energy (keV)

15 20

Generated

Emitted

Chapter 4 · X-Rays