Scanning Electron Microscopy and X-Ray Microanalysis

61 4

. Fig. 4.23 a Absorption parameter f(χ) as a function
of photon energy for copper and an incident beam
energy of E 0 = 20 keV. Note the abrupt decrease just
above the ionization energies of the three L-shells near
0.930 keV and the K-shell ionization energy at 8.98 keV.
b Comparison of the generated (red) and emitted (blue)
X-ray spectra for copper with an incident beam energy
of E 0 = 20 keV. c Comparison of the generated and
emitted X-ray spectra for copper with an incident beam
energy of E 0 = 20 keV; expanded to show the region of
the Cu L-shell and Cu K-shell ionization energies

Absorption parameter f(χ) for copper, E 0 = 20 keV

Photon energy (keV)

f(χ

)

1.0

a

0.8

0.6

0.4

0.2

0.0

0510 15 20

c 1e+7

1e+6

1e+5

Emitted

Copper, E 0 = 20 keV

Generated

1e+4

1e+3

1e+2

02

Photon energy (keV)

X-

ray intensit

y

46810

1e+8

1e+7

1e+6

1e+5

Emitted

Generated

Copper, E 0 = 20 keV

1e+4

X-1e+3

ray intensit

y

1e+2

1e+1

1e+0

0510

Photon energy (keV)

15 20

b

4.5 · X-Ray Fluorescence