Scanning Electron Microscopy and X-Ray Microanalysis

379 22

.

Table 22.7c

Analysis of SRM 481 (Au-Ag alloys); surface after second repolishing with 1- and 0.25-

μm diamond;

E^0

=^

5 keV; standards: Ag, Au

Alloy

Raw analytical total

Au (norm)

σ(%) 5 loc

RDEV (%)

DTSA-II error budget (%)

Ag (norm)

σ(%) 5 loc

RDEV (%)

DTSA-II error budget (%)

20Au–80Ag

1.005

0.2398

0.87 %

+6.9 %

0.38 %

0.7602

0.28 %

−2.0 %

0.64 %

40Au–60Ag

0.9983

0.4045

0.23

+1.1

0.27

0.5955

0.16

−

0.64

0.98

60Au–40Ag

0.9897

0.6084

0.13

+1.3

0.21

0.3916

0.21

−

1.9

1.4

80Au–20Ag

0.9998

0.8055

0.26

+0.62

0.19

0.1945

1.1

−

2.5

1.9

20Au–80Ag

1.005

0.2398

0.87

+6.9

0.38

0.7602

0.28

−

2.0

0.64

.

Table 22.7d

Analysis of SRM 481 (Au-Ag alloys); surface after third repolishing with 1- and 0.25-

μm diamond;

E^0

=

5 keV; standards: Ag, Au

Alloy

Raw analytical total

Au (norm)

σ(%) 5 loc

RDEV (%)

DTSA-II error budget (%)

Ag (norm)

σ(%) 5 loc

RDEV (%)

DTSA-II error budget (%)

20Au–80Ag

1.017

0.2251

0.13

−0.11

0.39

0.7749

0.13

+0.35

0.61

40Au–60Ag

0.9988

0.3909

0.25

−2.3

0.28

0.6091

0.16

+1.6

0.93

60Au–40Ag

0.9931

0.5931

0.12

−1.2

0.22

0.4069

0.18

+1.9

1.4

80Au–20Ag

0.9957

0.7979

0.17

−0.32

0.18

0.2021

0.68

+1.2

1.9

22.3 · Challenges and Limitations of Low Beam Energy X-Ray Microanalysis