Scanning Electron Microscopy and X-Ray Microanalysis

528

30

References

Giannuzzi L, Michael J (2013) Comparison of channeling contrast

between ion and electron images. Microsc Microanal 19:344

Giannuzzi L et al (2006) Introduction to focused ion beams: instrumen-

tation, theory, techniques and practice. Springer Science & Business

Media, New York

Joy D, Michael J (2014) Modeling ion-solid interactions for imaging

applications. MRS Bulletin 39:342

Kotula P, Keenan M, Michael J (2006) Tomographic spectral imaging

with multivariate statistical analysis: comprehensive 3D microanal-

ysis. Microsc Microanal 12:36

Mayer J, Giannuzz LA, Kamino T, Michael J (2007) TEM sample prepara-

tion and FIB-induced damage. MRS bulletin 32(05):400–407

Michael J (2011) Focused ion beam-induced microstructural alterations:

texture development, grain growth, and intermetallic formation.

Microsc Microanal 17:386

Nastasi M, Mayer J, Hirvonen J (1996) Ion-solid interactions: fundamen-

tals and applications. Cambridge University Press, Cambridge

Orloff J, Swanson L, Utlaut M (1996) Fundamental limits to imaging reso-

lution for focused ion beams. J Vac Sci Technol B 14:3759

Orloff J, Swanson L, Utlaut M (2003) High resolution focused ion beams:

FIB and its applications: Fib and its applications: the physics of liq-

uid metal ion sources and ion optics and their application to

focused ion beam technology. Springer Science & Business Media,

New York

Prasad S, Michael J, Christenson T (2003) EBSD studies on wear-induced

subsurface regions in LIGA nickel. Scr Mater 48:255

Ziegler J, Biersack J (1985) The stopping and range of ions in matter. In:

Treatise on heavy-ion science. Springer US, New York, pp 93–129

a

b

. Fig. 30.15 Preparation of a cantilever beam style sample for serial
sectioning. a The sample before sectioning consist of the tin whisker
coated extensively with platinum using first the electron beam and
then the ion beam. The cantilever beam was shaped with the FIB and
thinned to maximize the speed of cutting. b The same beam after serial
sectioning. EBSD was performed at every slice. Note the large cross
used as a fiducial to align images

16.6 μm

15 μm

27.8 μm

. Fig. 30.16 EBSD 3D reconstruction of a tin whisker from serial
sectioning data in the FIB. The acquisition required 75 200-nm-thick
sections and took nearly 48 h to complete sectioning and data
acquisition

Chapter 30 · Focused Ion Beam Applications in the SEM Laboratory