Scanning Electron Microscopy and X-Ray Microanalysis
163 10 poor signal collection on the sides of the steps, which are illu- minated in the TTL SE detector image. While the example ...
16 4 10 10.6.3 Pathological Specimen and Instrumentation Behavior Instrumentation Behavior Contamination A modern SEM that is we ...
© Springer Science+Business Media LLC 2018 J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, https://do ...
166 11 The incident beam energy is one of the most useful parame- ters over which the microscopist has control because it deter- ...
167 11 (2) Although the SE 1 are sensitive to surface characteristics within the escape depth of ~ 10 nm (metals), this surface ...
168 11 012 345 Beam energy (keV) 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0.0 Se condar y elec tron coefficien t Reimer and Tollkamp (198 ...
169 11 unless an ultrahigh vacuum instrument is used, where the chamber pressure is <10−^8 Pa (10−^10 torr). 11.3 Selecting t ...
170 11 . Fig. 11.6 Beam energy series of images of a carbon film, nominally 7 nm thick, deposited on an aluminum SEM stub in the ...
171 11 7 nm of carbon shadowed through a grid. The contrast between the carbon and the aluminum behaves in a complex fashion. T ...
17 2 11 References Bongeler R, Golla U, Kussens M, Reimer L, Schendler B, Senkel R, Spranck M (1993) Electron-specimen interacti ...
© Springer Science+Business Media LLC 2018 J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, https://do ...
174 12 12.1 Review: The Conventional SEM High Vacuum Environment The conventional SEM must operate with a pressure in the sample ...
175 12 regions of successively lower pressure, with each region separated by small apertures from the regions on either side and ...
176 12 12.3.2 Controlling the Water Environment of a Specimen of a Specimen Careful control and preservation of the water conten ...
17 7 12 with a cooling stage capable of reaching −5 °C to 5 °C. With careful control of both the pressure of water vapor added t ...
178 12 Skirt intensity Elastic scattering event with gas atom Unscattered beam intensity Limit for 99 % of beam electrons Intens ...
179 12 Kanaya–Okayama range equation. For a copper specimen and E 0 = 20 keV, the full range RK-O = 1.5 μm, which is also a good ...
180 12 current. To capture 0.95 of the total beam current requires a radial distance to approximately 190 μm, as shown in . Fig. ...
181 12 12.5 VPSEM Image Resolution Remarkably, despite the strong gas scattering and the develop- ment of the skirt around the f ...
182 12 12.6 Detectors for Elevated Pressure Microscopy 12.6.1 Backscattered Electrons—Passive Scintillator Detector Scintillator ...
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