Scanning Electron Microscopy and X-Ray Microanalysis
205 15 E-T (-bias) . Fig. 15.7 Highly polished iron-carbon specimen imaged at E 0 = 20 keV and Ip = 10 nA with the negatively bi ...
206 15 15.3 Case Study: Detecting Ink-Jet Printer Deposits Ink-jet printing was used to deposit controlled quantities of reagent ...
207 15 a b cd g h ef . Fig. 15.12 a SEM-ET (positive bias) image of ink-jet deposits on a pol- ished carbon substrate with E 0 = ...
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210 16 16.1 The Energy Dispersive Spectrometry (EDS) Process As illustrated in. Fig. 16.1, the physical basis of energy dis- per ...
211 16 Electrons holes X-rays Au electrode, ~20 nm Window: Si 3 N 4 or polymer supported on etched Si grid Active silicon (intri ...
212 16 EDS black box Input: X-ray photon Output: an estimate of photon energy Photon energy Number of photon s Repeated measurem ...
213 16 subject to the EDS resolution function, including the X-ray bremsstrahlung (continuum) background, but because the contin ...
214 16 Sn E 0 = 20 keV Au E 0 = 20 keV SnL (^3) -M 4,5 escape SnL (^2) -M (^4) escape Au M (^5) -N 6,7 escape Au M (^4) -N (^6) ...
215 16 chain to suppress this effect by rejecting the measurement of both photons, but as the flux of X-rays increases, an incre ...
216 16 peak-like structure. The absorption of X-rays by the Si grid and Si dead-layer ionizes Si atoms and subsequently results ...
217 16 (at the cost of X-ray throughput) and one that optimizes throughput (at the cost of resolution). Confirming the desired c ...
218 16 measurements are made on the basis of the same “live-time” so as to achieve constant dose for quantitative measurements. ...
219 16 major constituents (O, Mg, Al, Si, Ca, and Fe) measured at increasing dead-time. The spectra show the in-growth of a seri ...
220 16 Elevation angle Objective lens Optimal working distance C L Y X Z Axes ψ: EDS detec tor snout Sample . Fig. 16.11 The ele ...
221 16 position, which you should test to ensure that the positioning is reproducible between insertions. Manual mechanisms usu- ...
222 16 correction. The elevation angle (usually sloppily called the “take-off angle”) is often a configuration option that may b ...
223 16 design or manufacturing. From the detector geometry sec- tion, we know that the optimal working distance is the dis- tanc ...
224 16 Plot the data to demonstrate the variation of the intensity as a function of position.. Figure 16.16 shows the map from ...
225 16 channels to sum together for the Cu L-family and Cu K-L2,3 lines. The Cu K-L2,3 lines are often quite dim. Using the “Im ...
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