Scanning Electron Microscopy and X-Ray Microanalysis
80 5 to assume this setting will reliably produce the displayed value. Well-equipped SEMs have a built-in picoammeter that can b ...
81 5 Although every one of the basic SEM operational modes requires some compromise, in Resolution Mode the pursuit of high spat ...
82 5 energies is the chromatic aberration of the objective lens. This aberration causes beam electrons at different energies to ...
83 5 In some cases the SEM may allow the operator to apply a sample bias or use another form of beam deceleration, thus permitti ...
84 5 Elevation (Take-Off ) Angle, ψ, and Azimuthal Angle, ζ The effective position of a detector is specified by two angles. The ...
85 5 Energy Response The response of a detector may be sensitive to the kinetic energy of the striking electron. Generally an el ...
86 5 kAdjustable Controls The Wells–Robinson scintillation BSE detector is often mounted on an externally controlled, motorized ...
87 5 ( 1957 ) solved the problem of detecting very low energy sec- ondary electrons by using a scintillator with a thin metal co ...
88 5 complete suite of SE 1 , SE 2 , SE3, and the direct BSE is collected, creating a complex mix of BSE and true SE image contr ...
89 5 iiSC=−BBiiSS− C (5.15) For the copper target, the BSE current will be iBSE = η×iB = 0.3 iB and the SE current will be iSE = ...
90 5 contrast (e.g., topography, compositional differences, electron channeling, or most problematically, changing δ and η value ...
91 5 The corresponding theoretical S/N ratio is estimated from the number n of BSE produced, which depends on the inci- dent bea ...
© Springer Science+Business Media LLC 2018 J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, https://do ...
94 6 6.1 Image Construction by Scanning Action After leaving the electron source, the beam follows the central (optic) axis of t ...
95 6 ments or “pixels” of number n along an edge. The specimen pixel edge dimension is given by Specimenpixeldimension=ln/ (6.1) ...
96 6 Technology [USA]), shown in. Fig. 6.4. This scale calibra- tion artifact consists of an elaborate collection of linear fea- ...
97 6 With square pixels, the shape of an object is faithfully trans- ferred, as shown in. Fig. 6.5a, while non-square pixels in ...
98 6 different working distance (i.e., objective lens strength) is used subsequently to image the unknown specimen, the SEM soft ...
99 6 . Fig. 6.7 a Schematic illustra- tion of projection distortion of tilted surfaces. b Illustration of foreshortening of fami ...
100 6 successive scan rays of the SEM image have such a small angu- lar spread relative to the optic axis that they create a nea ...
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