Scanning Electron Microscopy and X-Ray Microanalysis
XXI 21 Trace Analysis by SEM/EDS ............................................................................................... ...
XXII 24 Compositional Mapping .................................................................................................. ...
XXIII 28 Cathodoluminescence ................................................................................................... ...
© Springer Science+Business Media LLC 2018 J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, https://do ...
2 1 1.1 What Happens When the Beam Electrons Encounter Specimen Atoms? By selecting the operating parameters of the SEM electron ...
3 1 kNote the change of scale The Bethe range for Au with an incident beam energy of 20 keV is approximately 1200 nm, a linear c ...
4 1 1.3 Elastic Scattering: Beam Electrons Change Direction of Flight Simultaneously with inelastic scattering, “elastic scatter ...
5 1 1.4 Simulating the Effects of Elastic Scattering: Monte Carlo Calculations Inelastic scattering sets a limit on the total di ...
6 1 Given a specific set of these parameters, the Monte Carlo elec- tron trajectory simulation utilizes geometrical expressions ...
7 1 Cu E 0 = 20 keV 200 nm 0.0 nm 200.0 nm 400.0 nm 600.0 nm 800.0 nm -582.5 nm -291.3 nm -0.0 nm 291.3 nm 582.5 nm a Cu E 0 = 2 ...
8 1 500 nm computed BS yield = 0.31 Energy (keV) Tilt/TOA Number Select Repeat Exit 20 35 0 . Fig. 1.6 Three-dimensional represe ...
9 1 Cu E 0 = 20 keV 5% 10% 25% 0.0 nm 206.3 nm 412.6 nm 618.9 nm 825.2 nm -300.4 nm 0.0 nm 300.4 nm 5.0% 10.0% 50.0% 90.0% 25.0% ...
10 1 E 0 = 20 keV 0° tilt C 0.0 nm 892.6 nm 1785.3 nm 2677.9 nm 3570.6 nm 2600.0 nm 0.0 nm 755.3 nm 1510.6 nm 2265.9 nm 3021.3 n ...
11 1 Cu 0° tilt 500 nm 30 keV 20 keV 10 keV 5 keV 0.0 nm 0.0 nm 233.5 nm 466.9 nm 700.4 nm 933.8 nm -680.0 nm -340.0 nm 0.0 nm 3 ...
12 1 1.5 A Range Equation To Estimate the Size of the Interaction Volume While the Monte Carlo simulation is a powerful tool to ...
13 1 is shown superimposed on the Monte Carlo simulation of the interaction volume in. Fig. 1.11 and is plotted graphi- cally in ...
14 1 References Bethe H (1930) Theory of the transmission of corpuscular radiation through matter. Ann Phys Leipzig 5:325 CASINO ...
© Springer Science+Business Media LLC 2018 J. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, https://do ...
16 2 4.2.1 Origin Close inspection of the trajectories in the Monte Carlo simu- lation of a flat, bulk target of copper at 0° ti ...
17 2 the transition elements, e.g., Z = 26 (Fe), the slope progressively decreases until at very high Z, e.g., the region around ...
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